The thin-film test vehicle (Figure 1) used for evaluating conformal coatings consisted of a serpentine metal (copper or silver) thin film (800nm thick) sputtered on oxidized silicon die 15x15mm. The FoS chamber was modified so that there was no forced air circulation and no chlorine gas in the chamber, only sulfur vapor. The resistances of the thin films were measured using potentiostats to pump known values of currents through the thin films and measuring the voltage drops across them. Thin film temperatures were monitored using thermocouples attached to a data logger. Resistance and temperature readings were taken simultaneously every 10 minutes over the 5-day period of each test.
Three conformal coatings were tested: acrylic coating 39-45 um thick; silicone coating 100 um thick; and atomic level deposition (ALD) coating 0.1 um thick. ALD coatings are ultra-thin (1-200 nm), stochiometric, dense and highly uniform in thickness. The ALD process is performed in a vacuum reactor at relatively low temperatures, typically 80-300°C, depending on the material deposited and the substrate thermal budget. To characterize/evaluate the effectiveness of the conformal coatings, the corrosion rates of the coated thin films were measured and compared with uncoated (bare) thin films.
Four tests were run with the chamber under the conditions shown on the psychometric chart of Figure 2: (1) 15% relative humidity, 40oC; (2) 15% relative humidity, 50oC; (3) 31% relative humidity, 50oC; and (4) 75% relative humidity, 50oC. The durations of various electrical and temperature conditions are listed in Table 1.
The effect of the chamber temperature is clear: a 40oC chamber environment is less corrosive than a 50oC environment. On the other hand, higher relative humidity makes the air less corrosive. At higher humidity, the sulfur concentration in the chamber decreases because of sulfur vapor absorption by surfaces with higher amounts of adsorbed moisture. Lower sulfur concentration makes the air less corrosive.
Figure 3 summarizes the corrosion rates of copper and silver serpentine thin films coated with acrylic or silicone and compares them to corrosion rates of bare (uncoated) copper and silver films. ALD coated thin film corrosion rates were not included because their corrosion rates were too low — they were within the limits of the experimental error.
The acrylic coating protected copper thin films from corrosion to some extent. In a 40oC FoS environment, the corrosion rate of acrylic coated copper was two orders of magnitude less compared to bare copper. Increasing the FoS environment temperature to 50oC increased the acrylic coated copper thin film corrosion rate by approximately an order of magnitude. Of the three humidity test conditions (15, 31 and 75%), the highest corrosion rate of acrylic coated copper was at 75% relative humidity. Acrylic coatings did not protect the underlying silver thin films. The increase in temperature from 40o to 50oC increased the silver corrosion rate somewhat.
The silicone coating provided no corrosion protection to the underlying copper thin films. At 40oC and 15% relative humidity, silicone coating provided some corrosion protection to silver thin films. At 50oC, silicone coating provided no corrosion protection to the underlying silver thin film over the whole range of relative humidity tested.
Another interesting observation is that Ag2S whiskers grew on the bare silver thin films and that these whiskers were prevented from growing by the three conformal coatings.
Predicting field performance often requires accelerated testing involving higher temperatures and harsher environments to shorten the test times to convenient durations. A downside of harsher conditions is that they may unduly overstress the hardware, thus changing the failure mechanism from one actually occurring in the field. A better approach is to keep the test conditions close to or the same as the field conditions and to shorten the test time by improving the sensitivity of detection of the hardware degradation. The latter approach was taken in the INEMI study by characterizing conformal coatings based on the corrosion rates of coated thin films that can be measured with down to +/-1 nm sensitivity. As a result, there is no need to accelerate the test conditions. This and earlier studies indicate that the environmental conditions in a flowers of sulfur chamber at 40oC are adequate for testing conformal coatings for many applications.